Electrical and Computer Engineering

University of Manitoba

Nano Systems Fabrication Laboratory - NSFL

About the NSFL


The NSFL is an open access cleanroom micromachining lab established to provide nano-system R&D and prototyping to university and industry researchers.  As a central facility, the NSFL links multidisciplinary researchers from many university departments.  This 4000 ft. sq. laboratory possess over $4 million of nanofabrication infrastructure, providing a comprehensive suite of state of the art equipment and software for MEMS fabrication, analysis, and testing. 


The NSFL has assisted many research groups from across the U of M campus, and several outside industry and organizations.  Over 200 professors, students (ranging from high school to Ph.D. level), and industry personnel have used the NSFL.  Some of the supported research projects have included:


  1. MEMS for telecommunications

  2. Gas sensors for industrial and agricultural applications

  3. Nanoelectronic sensor systems

  4. Microsensors for magnetic and electric field measurement

  5. Ultra-thin dielectrics for nanoelectronics

  6. Microfluidic biosensor for cell diagnostics

  7. Conducting polymer-based nanoelectronics

  8. Magnetic, thermal, and electrostatic microactuators

  9. Micromolding and electroplating

  10. Coatings for liquid crystal research

  11. Microfluidics for industrial cooling

  12. Coatings for synchrotron FTIR microspectroscopy

  13. Quantum pin excitations and ferromagnetic resonance in semiconductors

  14. Supercapacitor materials

  15. Inkjet deposition technologies

  16. Adaptive mirror technologies

  17. MEMS for power systems applications