Facility

1. ✦ Open access Nano Systems Fabrication Laboratory (NSFL), class 10 - 100 cleanroom
   

2. ‣ Thin-film Deposition
   

3. ‣ Dry Etching, Plasma Etching
   

4. ‣ High Temperature Processing
   

5. ‣ Lithography
   

6. ‣ Wet Processing
   

7. ‣ Dicing, Packaging, Polishing
   

8. ‣ Test, Measurement, and Analysis Equipments
   

9. ✦ Microelectronics and Nanotechnology Research Lab, E3-480, EITC Bldg.
   

10. ‣Test, Measurement, and Analysis Equipments
    

11. ‣ Newport Optic System
    

12. ‣ Automated Ultrasonic Bath
    

13. ✦ Gas Flow Management System, Olfactometer
    

14. ✦ National Instruments RF system integration package in a PXI chassis (RF-MEMS MIP)
    

15. ✦ Electron Spectroscopy for Chemical Analysis (ESCA - XPS)
    

16. ✦ Auger Spectroscopy (AS)
    

17. ✦ Dynamic Secondary Ion Mass Spectroscopy
    

18. ✦ SEM/TEM Analysis
    

Links

University of Manitoba

Department of Electrical and Computer Engineering, University of Manitoba

Nano Systems Fabrication Laboratory, (NSFL)

UM SPM/MEMS Research Laboratory

Manitoba Institute for Materials

Advanced RF Systems Laboratory

External

Prof. R. M. Wallace’s Electronic Materials Laboratory, UT Dallas