Micro-fluidics systems in silicon for lab-on-a-chip applications

To harness the wealth of success and computational power from the microelectronics industry, lab-on-a-chip (LOC) applications should ultimately be fully integrated with silicon platforms. In this project, a dielectrophoretic (DEP) cage device is built entirely on a silicon substrate using standard CMOS processing techniques. The dielectrophoresis-based lab-on-a-chip device with only four electrical contacts developed in this work will act as another incremental step toward the development of DEP applications on silicon.