1. Open access Nano Systems Fabrication Laboratory (NSFL), class 10 - 100 cleanroom

  2. Thin-film Deposition

  3. Dry Etching, Plasma Etching

  4. High Temperature Processing

  5. Lithography

  6. Wet Processing

  7. Dicing, Packaging, Polishing

  8. Test, Measurement, and Analysis Equipments

  9. Microelectronics and Nanotechnology Research Lab, E3-480, EITC Bldg.

  10. Test, Measurement, and Analysis Equipments

  11. Newport Optic System

  12. Automated Ultrasonic Bath

  13. Gas Flow Management System, Olfactometer

  14. National Instruments RF system integration package in a PXI chassis (RF-MEMS MIP)

  15. Electron Spectroscopy for Chemical Analysis (ESCA - XPS)

  16. Auger Spectroscopy (AS)

  17. Dynamic Secondary Ion Mass Spectroscopy

  18. SEM/TEM Analysis


University of Manitoba

Department of Electrical and Computer Engineering, University of Manitoba

Nano Systems Fabrication Laboratory, (NSFL)

UM SPM/MEMS Research Laboratory

Manitoba Institute for Materials

Advanced RF Systems Laboratory


Prof. R. M. Wallace’s Electronic Materials Laboratory, UT Dallas